Aluminum bulk micromachining through an anodic oxide mask by electrochemical etching in an acetic acid/perchloric acid solution
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منابع مشابه
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ژورنال
عنوان ژورنال: Microelectronic Engineering
سال: 2013
ISSN: 0167-9317
DOI: 10.1016/j.mee.2013.05.007